Spin Coating
DNS RF3 Coater Tool
- Installed in 2016 by DNS
- DNS support out of local office
- Configured for optimal operation with 2 spin cup modules
-
Up to 8 PR chemistries can be installed
- Solvent compatibility is required
- Throughput: > 40 WPH
- Installed in class 1 clean room
| Photoresist | PR Type | Thickness range, um (est.) | Status |
|---|---|---|---|
| 1 | l-line positive | 2.3 | In production |
| 2 | DUV (193 nm) Positive | 1.1 | In production |
| 3 | l-line positive | 3.5 - 5.0 | Please inquire |
| 4 | l-line positive | 10.0 | Please inquire |
Good with-in-wafer (WiW) uniformity <1%
Good with-in-lot (WiL), and lot-to-lot (LtL)
repeatability for both I Line and DUV films
I-line PR
Shipley Megaposit SPR 3012
PR Thickness uniformity and repeatability
DUV (193 nm) PR
TOK TDUR-P603
PR Thickness uniformity and repeatability
